Automation and Software Solution, Spare Parts

Comprehensive engineering solutions for industrial automation and software integration.

• Automation Solution: Design and Build
• Machine Spare Parts
• Software Solution: Data auto-transfer
• Machines and server interface
• Machines software upgrade and modification

Material Coating System

Advanced coating systems including ALD and PVD technologies.

ALD (Encapsulix)

• Atomic Layer Deposition
• Ultrabarrier Encapsulation
• Barrier Coating

PVD (O-Net Technologies)

• ON-S100/ON-S150 Sputtering System
• ON-S200/ON-S300 Sputtering System
• ON-E1300 E-Beam Evaporation System

Burn-in Test System

High-reliability testing systems for semiconductor and power modules.

• Wafer-level Reliability Test System
• High-Temperature Capacitor Testing System
• IGBT Power Module Test System
• Dynamic Burn-in Test System
• Power Cycling Testing/Experiment

Dummy Wafer Supply and Refurbish

High-quality dummy wafers for processing and testing.

• Available Sizes: 150mm, 200mm, 300mm
• Refurbishing services for dummy wafers

Mask Aligner & Lithography System

Precision lithography systems for semiconductor fabrication.

• ABM Mask Aligner Systems

Scanning Acoustic Microscope (C-SAM)

High-resolution acoustic microscopy for non-destructive testing.

• Inline fully-automatic systems
• Offline semi-automatic systems
• Offline manual systems